FLOOPS was later commercialized by ISE in 2002. Around 1994 a first version of the Florida Object Oriented Process Simulator (FLOOPS) was completed. At about the same time development of a new 3D process and device simulator began at TMA and after TMA was acquired by Avanti, the product was released in 1998 as Taurus. In 1992, Integrated Systems Engineering (ISE) came out with the 1D process simulator TESIM and the 2D process simulator DIOS. TMA commercialized SUPREM-IV (2D version) and called it TSUPREM4. Later Silvaco also commercialized SUPREM and named the product ATHENA. (TMA) which was formed in 1979 was the first company to commercialize SUPREM III. Building upon this beginning with improved models SUPREM II and SUPREM III were developed. The history of commercial process simulators began with the development of the Stanford University Process Modeling program. These interactions will stimulate the need for better interfaces to back end simulation tools or lead to integration of some of those capabilities into TCAD tools. For example, back end manufacturing may cause stress in the transistor region changing device performance. There are no similar tools available for accurate high resolution measurement of dopant or stress profiles.Nevertheless, there is growing interest to investigate the interaction between front end and back end manufacturing steps. One reason for delineation is the availability of powerful analysis tools such as electron microscopy techniques, scanning electron microscopy (SEM) and transmission electron microscopy (TEM), which allow for accurate measurement of device geometry. interconnect and dielectric layers are not considered. TCAD has traditionally focused mainly on the transistor fabrication part of the process flow ending with the formation of source and drain contacts-also known as front end of line manufacturing.
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